Why does silicon nitride play a crucial role in chips? Analyze the benefits of silicon nitride contrasted to various other materials.

In chip manufacturing, there is a material that plays a crucial role, that is silicon nitride (SiNx). Although it may not get the same attention as various other extra popular semiconductor products such as silicon (Si), gallium arsenide (GaAs) or gallium nitride (GaN), its relevance is undeniable. A lot of chips will utilize this product.


(Application of silicon nitride in chips)

1. Why is it SiNx?

Mindful buddies have actually discovered that I made use of SiNx when creating the chemical formula of silicon nitride. Buddies that have actually examined secondary school chemistry need to recognize that N is the 5th primary group element. Realistically, the valence should be -3, while the chemical valence of silicon is +4. The chemical formula of silicon nitride should be Si3N4. Exactly how can it be SiNx?

First, allow’s discuss the multivalent state of nitrogen: nitrogen has multiple valence states, mainly because it has 5 valence electrons, and nitrogen atoms can share these electrons in different means. Nitrogen can form different valence states, which generally depend upon the number of electrons it shows to other aspects.

For nitrogen, its most secure valence state is -3, such as in ammonia (NH3) and gallium nitride (GaN). However, nitrogen can also form a positive valence state by losing electrons, such as the +5 valence state in nitric acid (HNO3). Additionally, nitrogen can likewise create a valence state between -3 and +5, such as the +3 valence state in nitrous acid (HNO2) or the +1 and +2 valence states in some organic substances.

Second of all, let’s talk about silicon nitride:

In the semiconductor market, silicon nitride made use of in numerous applications is typically non-uniform, usually stood for by SiNx. SiNx is an amorphous product whose residential properties depend upon the ratio of nitrogen to silicon, that is, the value of x. When the value of x adjustments, the physical and chemical residential properties of silicon nitride will certainly also transform. Silicon nitride does be available in lots of kinds, including Si3N4, Si2N2, SiN, and so on


( structure of Si3N4)

Si3N4 is a crystalline product, which indicates that its silicon and nitrogen ratio is fixed. When the worth of x is equal to 4/3, SiNx is equal to Si3N4. Nonetheless, in practical applications, SiNx is frequently non-uniform, and its silicon and nitrogen ratio can be regulated by transforming the parameters of the PVD or CVD process.

2. What is the duty of SiNx in chip production?

Silicon nitride has excellent insulation residential or commercial properties, and its resistivity can be as high as 10 ^ 14 Ω · centimeters, much exceeding some typical shielding products such as silicon oxide (SiO2). Its reduced dielectric consistent makes it an ideal isolation layer in microwave and RF applications. The silicon nitride layer also contributes in blocking the diffusion of pollutants in the chip. It can prevent dopants such as boron and phosphorus from altering device characteristics with diffusion. Furthermore, it can also avoid the diffusion of metal ions to avoid mistakes such as short circuits.

The excellent thermal stability of silicon nitride is identified by its unique chemical homes and crystal framework. It can remain steady in a high-temperature setting without chemical decay or physical shape changes like other products. That’s because in the crystal structure of silicon nitride, each silicon atom is incorporated with 4 nitrogen atoms in the type of a tetrahedron, and each nitrogen atom is also combined with 4 silicon atoms in the type of a tetrahedron. This structure makes the crystal latticework of silicon nitride very stable and challenging to flaw. As a result, it is made use of as a gate-insulating layer when making high electron mobility transistors (HEMTs).


( role of SiNx in chip manufacturing)

3. What are the advantages of SiNx over SiO2?

Much better thermal stability, harder solidity, and harder to etch.

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